van Veghel, Marijn G. A.: search on Z-Library

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1

Identification, control and hysteresis compensation of a 3 DOF metrological AFM

Roel Merry, Mustafa Uyanik, René van de Molengraft, Richard Koops, Marijn van Veghel, Maarten Steinbuch

Journal:

Asian Journal of Control

Year:

2009

Language:

english

File:

PDF, 1012 KB

english, 2009

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Advances in Patterning Materials and Processes XXXII - Tailored molecular glass resists for scanning probe lithography

Wallow, Thomas I., Hohle, Christoph K., Neuber, Christian, Schmidt, Hans-Werner, Strohriegl, Peter, Ringk, Andreas, Kolb, Tristan, Schedl, Andreas, Fokkema, Vincent, van Veghel, Marijn G. A., Cooke, M

Year:

2015

Language:

english

File:

PDF, 650 KB

english, 2015

3

A virtual lateral standard for AFM calibration

Koops, Richard, van Veghel, Marijn, van de Nes, Arthur

Journal:

Microelectronic Engineering

Year:

2016

Language:

english

File:

PDF, 3.41 MB

english, 2016

4

A dedicated calibration standard for nanoscale areal surface texture measurements

Koops, Richard, van Veghel, Marijn, van de Nes, Arthur

Journal:

Microelectronic Engineering

Year:

2015

Language:

english

File:

PDF, 1.26 MB

english, 2015

5

AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Joint Research on Scatterometry and AFM Wafer Metrology

Bodermann, Bernd, Buhr, Egbert, Danzebrink, Hans-Ulrich, Bär, Markus, Scholze, Frank, Krumrey, Michael, Wurm, Matthias, Klapetek, Petr, Hansen, Poul-Erik, Korpelainen, Virpi, van Veghel, Marijn, Yaco

Year:

2011

Language:

english

File:

PDF, 191 KB

english, 2011

6

A compact new-concept ellipsometer for accurate large scale thin film measurements

Koops, Richard, Sonin, Petro, van Veghel, Marijn, El Gawhary, Omar

Journal:

Journal of Optics (IOPscience)

Year:

2014

Language:

english

File:

PDF, 858 KB

english, 2014

7

[IEEE 2008 American Control Conference (ACC '08) - Seattle, WA (2008.06.11-2008.06.13)] 2008 American Control Conference - Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage

Merry, Roel, Uyanik, Mustafa, Koops, Richard, van de Molengraft, Rene, van Veghel, Marijn, Steinbuch, Maarten

Year:

2008

Language:

english

File:

PDF, 515 KB

english, 2008

8

Reduction of Static Electricity Meter Errors by Broadband Compensation of Voltage and Current Channel Differences

Marais, Zander, van den Brom, Helko E., Kok, Gertjan, van Veghel, Marijn G. A.

Journal:

IEEE Transactions on Instrumentation and Measurement

Year:

2021

File:

PDF, 1.43 MB

2021

9

[IEEE 2009 American Control Conference - St. Louis, MO, USA (2009.06.10-2009.06.12)] 2009 American Control Conference - Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM

Merry, Roel, Uyanik, Mustafa, van de Molengraft, Rene, Steinbuch, Maarten, Koops, Richard, van Veghel, Marijn

Year:

2009

Language:

english

File:

PDF, 833 KB

english, 2009

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